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Lasers

Excimer Lasers

EX5 MINI EXCIMER Laser

. High technology in a low cost vitra compcet package

The EX5 gives high performance in a lightweight compact package. The laser is only 46 cm long.

The entire laser including the vacuum pump is packaged in one table top unit

Dimensions : 46 x 25 x 25 cm (L x W x H)

Power Requirements : 95-135 and 185-240 VAC, 2.5 / 5A, 47 / 63 Hz.

Weight : 14 kg

Parameter	F2	ArF	KrF	XeCl	XeF
Wavelength nm	157	193	248	308	351
Energy Max. mJ	1	10	20	7	6
Average power 100 Hz	.1	0.8	1.8	0.7	0.6
Average power @ 250 Hz	.2	1.6	3.6	1.5	1.3
Dynamic gas lifetime Pulse to 50% energy	3E6	7E6	12E6	15E6	10E6
Shelf Life Approx. to 50% energy	3 days	10 days	30 days	6 months	30 days
Pulse Length	10 nS
Beam Size	6 x 3 mm
Divergence	.2 x .1 mRad
Stability	>2% Standard Deviation
Tube Service	2 Billion Pulses
Cooling	Air

Lasers

Excimer Lasers

EX10

. An exceptional exciaer laser

. Static and dynamic gas lifetimes
unmatched by other excimer laser

. High efficiency

. High reliability

. Economical operation

Dimensions : 61 x 40 x 27 cm (L x W x H)

Power Requirements : 95-135 and 185-240 VAC, 8A / 15A, 47 / 63 Hz.

Weight : 40 kg

Parameter	F2	ArF	KrF	XeCl	XeF
Wavelength nm	157	193	248	308	351
Energy Max. mJ	2	20	35	15	15
Energy Control Range mJ	0-2	5-20	10-35	7-15	7-15
Average power W 300 / 600	.5/1	4/7	6/12	3/6	3/6
Average power 1000Hz Water cooled	1.4	10	18	8	8
Repetition Rate	300/600/1000 Hz
Dynamic gas lifetime Pulse to 50% energy	1E7	25E6	35E6	50E6	30E6
Static Gas Life to 50% energy	10 days	90 days	120 days	>1 year	90 days
Pulse Length	15 nS
Beam Size	8 x 3 mm
Divergence	1 x 2 mRad
Stability	<1% Standard Deviation
Tube Service	2 Billion Pulses
Cooling	Air

Lasers

Excimer Lasers

EX100

. High power and high stability

. Corona preionization

. Long gas lifetime

. On board vacauar pump

. High efficierey discharge

. Economical operation

Dimensions : 120 x 44 x 30 cm (L x W x H)

Power Requirements : 125 / 250 / 500 Hz 95-240 VAC, 8A / 15A, 47 / 63 Hz 1000 Hz 208-240 VAC 30A 47/63 Hz

Weight : 65 kg

Parameter	F2	ArF	KrF	XeCl	XeF
Wavelength nm	157	193	248	308	351
Energy Max. mJ	6	55	90	50	50
Average power 125 Hz	.5	6	10	5	5
Average power @ 250 Hz	1.0	10	18	10	9
Average power @ 500 Hz	2.0	18	35	20	15
Average power @ 1000 Hz W	3.5	32	65	38	28
Dynamic gas lifetime Pulse to 50% energy	15E6	25E6	30E6	30E6	30E6
Shelf Life Approx. to 50% energy	15 days	60 days	90 days	>1 year	120 days
Pulse Length	15-20 nS
Beam Size	9 x 4 mm
Divergence	.4 x .8 mRad
Stability	<1% Standard Deviation
Tube Service	2 Billion Pulses
Cooling	Air / Water